/*************************************************************************/ /* */ /* RC values have been extracted from TSMC's worst case interconnect */ /* tables included with spice model version 1.10. */ /* Document No. TA-10A5-6001 (T-018-LO-SP-001) Rev1.10 Nov 23, 2001 */ /* */ /* Resistance and Capacitance Values */ /* --------------------------------- */ /* The Apollo technology files included in this directory contain */ /* resistance and capacitance (RC) values for the purpose of timing */ /* driven place & route. Please note that the RC values contained in */ /* this tech file were created using the worst case interconnect models */ /* from the foundry and assume a full metal route at every grid location */ /* on every metal layer, so the values are intentionally very */ /* conservative. It is assumed that this technology file will be used */ /* only as a starting point for creating initial timing driven place & */ /* route runs during the development of your own more accurate RC */ /* values, tailored to your specific place & route environment. AS A */ /* RESULT, TIMING NUMBERS DERIVED FROM THESE RC VALUES MAY BE */ /* SIGNIFICANTLY SLOWER THAN REALITY. */ /* */ /* The RC values used in the Apollo technology file are to be used only */ /* for timing driven place and route. Due to accuracy limitations, */ /* please do not attempt to use this file for chip-level RC extraction */ /* in conjunction with your sign-off timing simulations. For chip-level */ /* extraction, please use a dedicated extraction tool such as starRC, */ /* HyperExtract or Simplex, etc. */ /* */ /*************************************************************************/ /* $Id: tsmc18_6lm.tf,v 1.23 2004/04/21 23:11:14 vikas Exp $ */ Technology { name = "" dielectric = 3.7136e-05 gridResolution = 5 unitTimeName = "ns" timePrecision = 1000 unitLengthName = "micron" lengthPrecision = 1000 unitResistanceName = "kohm" resistancePrecision = 10000000 unitCapacitanceName = "pf" capacitancePrecision = 10000000 unitInductanceName = "nh" inductancePrecision = 100 unitPowerName = "pw" powerPrecision = 1000 unitVoltageName = "v" voltagePrecision = 1000000 unitCurrentName = "ma" currentPrecision = 1000 } Tile "unit" { width = 0.66 height = 5.04 } Layer "METAL1" { layerNumber = 16 maskName = "metal1" isDefaultLayer = 1 maxCurrDensity = 10 defaultWidth = 0.23 minWidth = 0.23 minSpacing = 0.23 minArea = 0.202 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.56 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "cyan" lineStyle = "solid" pattern = "dot" /* (Worst case resistance model for METAL1 = 0.101 ohm/sq) * (0.001 kohm/ohm) = 1.0100e-04 */ unitMinResistance = 1.0100e-04 unitNomResistance = 1.0100e-04 unitMaxResistance = 1.0100e-04 /* (M1-PO1(FOX),W=0.23,S=0.33,Ca = 1.88e-02 fF/um) * (1/W = 1/0.23) * (0.001 pF/fF) = 8.1739e-05 */ unitMinCapacitance = 8.1739e-05 unitNomCapacitance = 8.1739e-05 unitMaxCapacitance = 8.1739e-05 /* (M1-PO1(FOX),W=0.23,S=0.33,Cf = 1.47e-02 fF/um) * 2 sides * (0.001 pF/fF) = 2.9400e-05 */ unitMinSideWallCap = 2.9400e-05 unitNomSideWallCap = 2.9400e-05 unitMaxSideWallCap = 2.9400e-05 /* (M1-FOX,W=0.23,S=0.33,Ca = 8.70e-03 fF/um) * (1/W = 1/0.23) * (0.001 pF/fF) = 3.7826e-05 */ unitMinChannelCap = 3.7826e-05 unitNomChannelCap = 3.7826e-05 unitMaxChannelCap = 3.7826e-05 /* (M1-FOX,W=0.23,S=0.33,Cf = 8.64e-03 fF/um) * 2 sides * (0.001 pF/fF) = 1.7280e-05 */ unitMinChannelSideCap = 1.7280e-05 unitNomChannelSideCap = 1.7280e-05 unitMaxChannelSideCap = 1.7280e-05 /* (Worst case conductor-to-substrate distance for METAL1 = 8800 A) * (0.0001 um/A) = 8.8000e-01 */ unitMinHeightFromSub = 8.8000e-01 unitNomHeightFromSub = 8.8000e-01 unitMaxHeightFromSub = 8.8000e-01 /* (Worst case conductor thickness for METAL1 = 5300 A) * (0.0001 um/A) = 5.3000e-01 */ unitMinThickness = 5.3000e-01 unitNomThickness = 5.3000e-01 unitMaxThickness = 5.3000e-01 } Layer "METAL2" { layerNumber = 18 maskName = "metal2" isDefaultLayer = 1 maxCurrDensity = 10 defaultWidth = 0.28 minWidth = 0.28 minSpacing = 0.28 minArea = 0.202 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.66 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "yellow" lineStyle = "solid" pattern = "blank" /* (Worst case resistance model for METAL2 = 0.101 ohm/sq) * (0.001 kohm/ohm) = 1.0100e-04 */ unitMinResistance = 1.0100e-04 unitNomResistance = 1.0100e-04 unitMaxResistance = 1.0100e-04 /* (M2-PO1(FOX),W=0.28,S=0.38,Ca = 5.70e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 2.0357e-05 */ unitMinCapacitance = 2.0357e-05 unitNomCapacitance = 2.0357e-05 unitMaxCapacitance = 2.0357e-05 /* (M2-PO1(FOX),W=0.28,S=0.38,Cf = 6.43e-03 fF/um) * 2 sides * (0.001 pF/fF) = 1.2860e-05 */ unitMinSideWallCap = 1.2860e-05 unitNomSideWallCap = 1.2860e-05 unitMaxSideWallCap = 1.2860e-05 /* (M2-FOX,W=0.28,S=0.38,Ca = 4.37e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.5607e-05 */ unitMinChannelCap = 1.5607e-05 unitNomChannelCap = 1.5607e-05 unitMaxChannelCap = 1.5607e-05 /* (M2-FOX,W=0.28,S=0.38,Cf = 5.61e-03 fF/um) * 2 sides * (0.001 pF/fF) = 1.1220e-05 */ unitMinChannelSideCap = 1.1220e-05 unitNomChannelSideCap = 1.1220e-05 unitMaxChannelSideCap = 1.1220e-05 /* (Worst case conductor-to-substrate distance for METAL2 = 19840 A) * (0.0001 um/A) = 1.9840e+00 */ unitMinHeightFromSub = 1.9840e+00 unitNomHeightFromSub = 1.9840e+00 unitMaxHeightFromSub = 1.9840e+00 /* (Worst case conductor thickness for METAL2 = 5300 A) * (0.0001 um/A) = 5.3000e-01 */ unitMinThickness = 5.3000e-01 unitNomThickness = 5.3000e-01 unitMaxThickness = 5.3000e-01 } Layer "METAL3" { layerNumber = 28 maskName = "metal3" isDefaultLayer = 1 maxCurrDensity = 10 defaultWidth = 0.28 minWidth = 0.28 minSpacing = 0.28 minArea = 0.202 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.56 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "red" lineStyle = "solid" pattern = "blank" /* (Worst case resistance model for METAL3 = 0.101 ohm/sq) * (0.001 kohm/ohm) = 1.0100e-04 */ unitMinResistance = 1.0100e-04 unitNomResistance = 1.0100e-04 unitMaxResistance = 1.0100e-04 /* (M3-PO1(FOX),W=0.28,S=0.28,Ca = 3.19e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.1393e-05 */ unitMinCapacitance = 1.1393e-05 unitNomCapacitance = 1.1393e-05 unitMaxCapacitance = 1.1393e-05 /* (M3-PO1(FOX),W=0.28,S=0.28,Cf = 4.24e-03 fF/um) * 2 sides * (0.001 pF/fF) = 8.4800e-06 */ unitMinSideWallCap = 8.4800e-06 unitNomSideWallCap = 8.4800e-06 unitMaxSideWallCap = 8.4800e-06 /* (M3-FOX,W=0.28,S=0.28,Ca = 2.72e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 9.7143e-06 */ unitMinChannelCap = 9.7143e-06 unitNomChannelCap = 9.7143e-06 unitMaxChannelCap = 9.7143e-06 /* (M3-FOX,W=0.28,S=0.28,Cf = 4.00e-03 fF/um) * 2 sides * (0.001 pF/fF) = 8.0000e-06 */ unitMinChannelSideCap = 8.0000e-06 unitNomChannelSideCap = 8.0000e-06 unitMaxChannelSideCap = 8.0000e-06 /* (Worst case conductor-to-substrate distance for METAL3 = 30880 A) * (0.0001 um/A) = 3.0880e+00 */ unitMinHeightFromSub = 3.0880e+00 unitNomHeightFromSub = 3.0880e+00 unitMaxHeightFromSub = 3.0880e+00 /* (Worst case conductor thickness for METAL3 = 5300 A) * (0.0001 um/A) = 5.3000e-01 */ unitMinThickness = 5.3000e-01 unitNomThickness = 5.3000e-01 unitMaxThickness = 5.3000e-01 } Layer "METAL4" { layerNumber = 31 maskName = "metal4" isDefaultLayer = 1 maxCurrDensity = 10 defaultWidth = 0.28 minWidth = 0.28 minSpacing = 0.28 minArea = 0.202 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.66 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "green" lineStyle = "solid" pattern = "blank" /* (Worst case resistance model for METAL4 = 0.101 ohm/sq) * (0.001 kohm/ohm) = 1.0100e-04 */ unitMinResistance = 1.0100e-04 unitNomResistance = 1.0100e-04 unitMaxResistance = 1.0100e-04 /* (M4-PO1(FOX),W=0.28,S=0.38,Ca = 2.21e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 7.8929e-06 */ unitMinCapacitance = 7.8929e-06 unitNomCapacitance = 7.8929e-06 unitMaxCapacitance = 7.8929e-06 /* (M4-PO1(FOX),W=0.28,S=0.38,Cf = 4.06e-03 fF/um) * 2 sides * (0.001 pF/fF) = 8.1200e-06 */ unitMinSideWallCap = 8.1200e-06 unitNomSideWallCap = 8.1200e-06 unitMaxSideWallCap = 8.1200e-06 /* (M4-FOX,W=0.28,S=0.38,Ca = 1.97e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 7.0357e-06 */ unitMinChannelCap = 7.0357e-06 unitNomChannelCap = 7.0357e-06 unitMaxChannelCap = 7.0357e-06 /* (M4-FOX,W=0.28,S=0.38,Cf = 3.89e-03 fF/um) * 2 sides * (0.001 pF/fF) = 7.7800e-06 */ unitMinChannelSideCap = 7.7800e-06 unitNomChannelSideCap = 7.7800e-06 unitMaxChannelSideCap = 7.7800e-06 /* (Worst case conductor-to-substrate distance for METAL4 = 41920 A) * (0.0001 um/A) = 4.1920e+00 */ unitMinHeightFromSub = 4.1920e+00 unitNomHeightFromSub = 4.1920e+00 unitMaxHeightFromSub = 4.1920e+00 /* (Worst case conductor thickness for METAL4 = 5300 A) * (0.0001 um/A) = 5.3000e-01 */ unitMinThickness = 5.3000e-01 unitNomThickness = 5.3000e-01 unitMaxThickness = 5.3000e-01 } Layer "METAL5" { layerNumber = 33 maskName = "metal5" isDefaultLayer = 1 maxCurrDensity = 10 defaultWidth = 0.28 minWidth = 0.28 minSpacing = 0.28 minArea = 0.202 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.61 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "blank" /* (Worst case resistance model for METAL5 = 0.101 ohm/sq) * (0.001 kohm/ohm) = 1.0100e-04 */ unitMinResistance = 1.0100e-04 unitNomResistance = 1.0100e-04 unitMaxResistance = 1.0100e-04 /* (M5-PO1(FOX),W=0.28,S=0.28,Ca = 1.68e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 6.0000e-06 */ unitMinCapacitance = 6.0000e-06 unitNomCapacitance = 6.0000e-06 unitMaxCapacitance = 6.0000e-06 /* (M5-PO1(FOX),W=0.28,S=0.28,Cf = 3.24e-03 fF/um) * 2 sides * (0.001 pF/fF) = 6.4800e-06 */ unitMinSideWallCap = 6.4800e-06 unitNomSideWallCap = 6.4800e-06 unitMaxSideWallCap = 6.4800e-06 /* (M5-FOX,W=0.28,S=0.28,Ca = 1.54e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 5.5000e-06 */ unitMinChannelCap = 5.5000e-06 unitNomChannelCap = 5.5000e-06 unitMaxChannelCap = 5.5000e-06 /* (M5-FOX,W=0.28,S=0.28,Cf = 3.14e-03 fF/um) * 2 sides * (0.001 pF/fF) = 6.2800e-06 */ unitMinChannelSideCap = 6.2800e-06 unitNomChannelSideCap = 6.2800e-06 unitMaxChannelSideCap = 6.2800e-06 /* (Worst case conductor-to-substrate distance for METAL5 = 52960 A) * (0.0001 um/A) = 5.2960e+00 */ unitMinHeightFromSub = 5.2960e+00 unitNomHeightFromSub = 5.2960e+00 unitMaxHeightFromSub = 5.2960e+00 /* (Worst case conductor thickness for METAL5 = 5300 A) * (0.0001 um/A) = 5.3000e-01 */ unitMinThickness = 5.3000e-01 unitNomThickness = 5.3000e-01 unitMaxThickness = 5.3000e-01 } Layer "METAL6" { layerNumber = 38 maskName = "metal6" isDefaultLayer = 1 maxCurrDensity = 16 defaultWidth = 0.44 minWidth = 0.44 minSpacing = 0.46 minArea = 0.562 fatWireThreshold = 10 fatFatMinSpacing = 0.6 fatThinMinSpacing = 0.6 pitch = 0.95 maxSegLenForRC = 2000 blink = 0 visible = 1 selectable = 1 color = "orange" lineStyle = "solid" pattern = "backSlash" /* (Worst case resistance model for METAL6 = 0.045 ohm/sq) * (0.001 kohm/ohm) = 4.5000e-05 */ unitMinResistance = 4.5000e-05 unitNomResistance = 4.5000e-05 unitMaxResistance = 4.5000e-05 /* (M6-PO1(FOX),W=0.44,S=0.46,Ca = 2.09e-03 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 4.7500e-06 */ unitMinCapacitance = 4.7500e-06 unitNomCapacitance = 4.7500e-06 unitMaxCapacitance = 4.7500e-06 /* (M6-PO1(FOX),W=0.44,S=0.46,Cf = 2.42e-03 fF/um) * 2 sides * (0.001 pF/fF) = 4.8400e-06 */ unitMinSideWallCap = 4.8400e-06 unitNomSideWallCap = 4.8400e-06 unitMaxSideWallCap = 4.8400e-06 /* (M6-FOX,W=0.44,S=0.46,Ca = 1.95e-03 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 4.4318e-06 */ unitMinChannelCap = 4.4318e-06 unitNomChannelCap = 4.4318e-06 unitMaxChannelCap = 4.4318e-06 /* (M6-FOX,W=0.44,S=0.46,Cf = 2.35e-03 fF/um) * 2 sides * (0.001 pF/fF) = 4.7000e-06 */ unitMinChannelSideCap = 4.7000e-06 unitNomChannelSideCap = 4.7000e-06 unitMaxChannelSideCap = 4.7000e-06 /* (Worst case conductor-to-substrate distance for METAL6 = 65200 A) * (0.0001 um/A) = 6.5200e+00 */ unitMinHeightFromSub = 6.5200e+00 unitNomHeightFromSub = 6.5200e+00 unitMaxHeightFromSub = 6.5200e+00 /* (Worst case conductor thickness for METAL6 = 9900 A) * (0.0001 um/A) = 9.9000e-01 */ unitMinThickness = 9.9000e-01 unitNomThickness = 9.9000e-01 unitMaxThickness = 9.9000e-01 } Layer "VIA12" { layerNumber = 17 maskName = "via1" isDefaultLayer = 1 maxCurrDensity = 0.4142e6 defaultWidth = 0.26 minWidth = 0.26 minSpacing = 0.26 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "43" lineStyle = "solid" pattern = "rectangleX" } Layer "VIA23" { layerNumber = 27 maskName = "via2" isDefaultLayer = 1 maxCurrDensity = 0.4142e6 defaultWidth = 0.26 minWidth = 0.26 minSpacing = 0.26 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "blue" lineStyle = "solid" pattern = "blank" } Layer "VIA34" { layerNumber = 29 maskName = "via3" isDefaultLayer = 1 maxCurrDensity = 0.4142e6 defaultWidth = 0.26 minWidth = 0.26 minSpacing = 0.26 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "yellow" lineStyle = "solid" pattern = "blank" } Layer "VIA45" { layerNumber = 32 maskName = "via4" isDefaultLayer = 1 maxCurrDensity = 0.4142e6 defaultWidth = 0.26 minWidth = 0.26 minSpacing = 0.26 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "white" lineStyle = "solid" pattern = "rectangleX" } Layer "VIA56" { layerNumber = 39 maskName = "via5" isDefaultLayer = 1 maxCurrDensity = 0.4142e6 defaultWidth = 0.36 minWidth = 0.36 minSpacing = 0.35 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "27" lineStyle = "solid" pattern = "rectangleX" } Layer "TEXT1" { layerNumber = 40 blink = 0 visible = 1 selectable = 1 color = "cyan" lineStyle = "solid" pattern = "blank" } Layer "TEXT2" { layerNumber = 41 blink = 0 visible = 1 selectable = 1 color = "yellow" lineStyle = "solid" pattern = "blank" } Layer "TEXT3" { layerNumber = 42 blink = 0 visible = 1 selectable = 1 color = "red" lineStyle = "solid" pattern = "blank" } Layer "TEXT4" { layerNumber = 43 blink = 0 visible = 1 selectable = 1 color = "green" lineStyle = "solid" pattern = "blank" } Layer "TEXT5" { layerNumber = 44 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "blank" } Layer "TEXT6" { layerNumber = 45 blink = 0 visible = 1 selectable = 1 color = "orange" lineStyle = "solid" pattern = "blank" } Layer "artiscanTEXT" { layerNumber = 63 blink = 0 visible = 1 selectable = 1 color = "35" lineStyle = "solid" pattern = "blank" } Layer "NWELL" { layerNumber = 2 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "dash" pattern = "blank" } Layer "PIMP" { layerNumber = 7 blink = 0 visible = 1 selectable = 1 color = "14" lineStyle = "dash" pattern = "slash" } Layer "NIMP" { layerNumber = 8 blink = 0 visible = 1 selectable = 1 color = "42" lineStyle = "dash" pattern = "backSlash" } Layer "PDIFF" { layerNumber = 11 blink = 0 visible = 1 selectable = 1 color = "19" lineStyle = "solid" pattern = "enter" } Layer "NDIFF" { layerNumber = 12 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "POLY1" { layerNumber = 13 maskName = "poly" isDefaultLayer = 1 defaultWidth = 0.18 minWidth = 0.18 minSpacing = 0.25 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "49" lineStyle = "solid" pattern = "solid" } Layer "CONT" { layerNumber = 15 maskName = "polyCont" isDefaultLayer = 1 defaultWidth = 0.22 minWidth = 0.22 minSpacing = 0.25 pitch = 0 blink = 0 visible = 1 selectable = 1 color = "27" lineStyle = "solid" pattern = "solid" } Layer "PAD" { layerNumber = 19 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "ESD2DMY" { layerNumber = 137 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "ESD1DMY" { layerNumber = 136 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "RPDMY" { layerNumber = 54 blink = 0 visible = 1 selectable = 1 color = "33" lineStyle = "dash" pattern = "blank" } Layer "ESD3DMY" { layerNumber = 155 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "SDI" { layerNumber = 58 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "DMP2V" { layerNumber = 149 blink = 0 visible = 1 selectable = 1 color = "35" lineStyle = "dash" pattern = "blank" } Layer "DMN2V" { layerNumber = 150 blink = 0 visible = 1 selectable = 1 color = "36" lineStyle = "dash" pattern = "blank" } Layer "PSUB2" { layerNumber = 50 blink = 0 visible = 1 selectable = 1 color = "magenta" lineStyle = "solid" pattern = "zigzag" } Layer "DIODE" { layerNumber = 56 blink = 0 visible = 1 selectable = 1 color = "green" lineStyle = "solid" pattern = "blank" } Layer "DIFF" { layerNumber = 3 blink = 0 visible = 1 selectable = 1 color = "19" lineStyle = "solid" pattern = "enter" } Layer "OD2" { layerNumber = 4 blink = 0 visible = 1 selectable = 1 color = "22" lineStyle = "solid" pattern = "blank" } Layer "RPO" { layerNumber = 34 blink = 0 visible = 1 selectable = 1 color = "21" lineStyle = "dash" pattern = "blank" } ContactCode "CONT1" { contactCodeNumber = 1 cutLayer = "CONT" lowerLayer = "POLY1" upperLayer = "METAL1" isDefaultContact = 1 upperLayerEncWidth = 0.06 upperLayerEncHeight = 0.01 lowerLayerEncWidth = 0.10 lowerLayerEncHeight = 0.10 cutWidth = 0.22 cutHeight = 0.22 minCutSpacing = 0.25 } ContactCode "via1" { contactCodeNumber = 2 cutLayer = "VIA12" lowerLayer = "METAL1" upperLayer = "METAL2" isDefaultContact = 1 upperLayerEncWidth = 0.06 upperLayerEncHeight = 0.01 lowerLayerEncWidth = 0.06 lowerLayerEncHeight = 0.01 cutWidth = 0.26 cutHeight = 0.26 minCutSpacing = 0.26 /* (Worst case resistance model for via1 = 6.4 ohm/ct) * (0.001 kohm/ohm) = 6.4000e-03 */ unitMinResistance = 6.4000e-03 unitNomResistance = 6.4000e-03 unitMaxResistance = 6.4000e-03 } ContactCode "via2" { contactCodeNumber = 3 cutLayer = "VIA23" lowerLayer = "METAL2" upperLayer = "METAL3" isDefaultContact = 1 upperLayerEncWidth = 0.06 upperLayerEncHeight = 0.01 lowerLayerEncWidth = 0.06 lowerLayerEncHeight = 0.01 cutWidth = 0.26 cutHeight = 0.26 minCutSpacing = 0.26 /* (Worst case resistance model for via2 = 6.4 ohm/ct) * (0.001 kohm/ohm) = 6.4000e-03 */ unitMinResistance = 6.4000e-03 unitNomResistance = 6.4000e-03 unitMaxResistance = 6.4000e-03 } ContactCode "via3" { contactCodeNumber = 4 cutLayer = "VIA34" lowerLayer = "METAL3" upperLayer = "METAL4" isDefaultContact = 1 upperLayerEncWidth = 0.06 upperLayerEncHeight = 0.01 lowerLayerEncWidth = 0.06 lowerLayerEncHeight = 0.01 cutWidth = 0.26 cutHeight = 0.26 minCutSpacing = 0.26 /* (Worst case resistance model for via3 = 6.4 ohm/ct) * (0.001 kohm/ohm) = 6.4000e-03 */ unitMinResistance = 6.4000e-03 unitNomResistance = 6.4000e-03 unitMaxResistance = 6.4000e-03 } ContactCode "via4" { contactCodeNumber = 5 cutLayer = "VIA45" lowerLayer = "METAL4" upperLayer = "METAL5" isDefaultContact = 1 upperLayerEncWidth = 0.06 upperLayerEncHeight = 0.01 lowerLayerEncWidth = 0.06 lowerLayerEncHeight = 0.01 cutWidth = 0.26 cutHeight = 0.26 minCutSpacing = 0.26 /* (Worst case resistance model for via4 = 6.4 ohm/ct) * (0.001 kohm/ohm) = 6.4000e-03 */ unitMinResistance = 6.4000e-03 unitNomResistance = 6.4000e-03 unitMaxResistance = 6.4000e-03 } ContactCode "via5" { contactCodeNumber = 6 cutLayer = "VIA56" lowerLayer = "METAL5" upperLayer = "METAL6" isDefaultContact = 1 upperLayerEncWidth = 0.09 upperLayerEncHeight = 0.09 lowerLayerEncWidth = 0.06 lowerLayerEncHeight = 0.01 cutWidth = 0.36 cutHeight = 0.36 minCutSpacing = 0.35 /* (Worst case resistance model for via5 = 2.54 ohm/ct) * (0.001 kohm/ohm) = 2.5400e-03 */ unitMinResistance = 2.5400e-03 unitNomResistance = 2.5400e-03 unitMaxResistance = 2.5400e-03 } FringeCap 1 { number = 1 layer1 = "METAL6" layer2 = "METAL5" /* (M6-M5,W=0.44,S=0.46,Cbottom = 3.61e-02 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 8.2045e-05 */ minFringeCap = 8.2045e-05 nomFringeCap = 8.2045e-05 maxFringeCap = 8.2045e-05 } FringeCap 2 { number = 2 layer1 = "METAL6" layer2 = "METAL4" /* (M6-M4,W=0.44,S=0.46,Cbottom = 1.62e-02 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 3.6818e-05 */ minFringeCap = 3.6818e-05 nomFringeCap = 3.6818e-05 maxFringeCap = 3.6818e-05 } FringeCap 3 { number = 3 layer1 = "METAL6" layer2 = "METAL3" /* (M6-M3,W=0.44,S=0.46,Cbottom = 1.11e-02 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 2.5227e-05 */ minFringeCap = 2.5227e-05 nomFringeCap = 2.5227e-05 maxFringeCap = 2.5227e-05 } FringeCap 4 { number = 4 layer1 = "METAL6" layer2 = "METAL2" /* (M6-M2,W=0.44,S=0.46,Cbottom = 8.89e-03 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 2.0205e-05 */ minFringeCap = 2.0205e-05 nomFringeCap = 2.0205e-05 maxFringeCap = 2.0205e-05 } FringeCap 5 { number = 5 layer1 = "METAL6" layer2 = "METAL1" /* (M6-M1,W=0.44,S=0.46,Cbottom = 7.62e-03 fF/um) * (1/W = 1/0.44) * (0.001 pF/fF) = 1.7318e-05 */ minFringeCap = 1.7318e-05 nomFringeCap = 1.7318e-05 maxFringeCap = 1.7318e-05 } FringeCap 6 { number = 6 layer1 = "METAL5" layer2 = "METAL4" /* (M5-M4,W=0.28,S=0.28,Cbottom = 3.05e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.0893e-04 */ minFringeCap = 1.0893e-04 nomFringeCap = 1.0893e-04 maxFringeCap = 1.0893e-04 } FringeCap 7 { number = 7 layer1 = "METAL5" layer2 = "METAL3" /* (M5-M3,W=0.28,S=0.28,Cbottom = 1.44e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 5.1429e-05 */ minFringeCap = 5.1429e-05 nomFringeCap = 5.1429e-05 maxFringeCap = 5.1429e-05 } FringeCap 8 { number = 8 layer1 = "METAL5" layer2 = "METAL2" /* (M5-M2,W=0.28,S=0.28,Cbottom = 1.07e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 3.8214e-05 */ minFringeCap = 3.8214e-05 nomFringeCap = 3.8214e-05 maxFringeCap = 3.8214e-05 } FringeCap 9 { number = 9 layer1 = "METAL5" layer2 = "METAL1" /* (M5-M1,W=0.28,S=0.28,Cbottom = 8.95e-03 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 3.1964e-05 */ minFringeCap = 3.1964e-05 nomFringeCap = 3.1964e-05 maxFringeCap = 3.1964e-05 } FringeCap 10 { number = 10 layer1 = "METAL4" layer2 = "METAL3" /* (M4-M3,W=0.28,S=0.38,Cbottom = 3.48e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.2429e-04 */ minFringeCap = 1.2429e-04 nomFringeCap = 1.2429e-04 maxFringeCap = 1.2429e-04 } FringeCap 11 { number = 11 layer1 = "METAL4" layer2 = "METAL2" /* (M4-M2,W=0.28,S=0.38,Cbottom = 1.63e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 5.8214e-05 */ minFringeCap = 5.8214e-05 nomFringeCap = 5.8214e-05 maxFringeCap = 5.8214e-05 } FringeCap 12 { number = 12 layer1 = "METAL4" layer2 = "METAL1" /* (M4-M1,W=0.28,S=0.38,Cbottom = 1.19e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 4.2500e-05 */ minFringeCap = 4.2500e-05 nomFringeCap = 4.2500e-05 maxFringeCap = 4.2500e-05 } FringeCap 13 { number = 13 layer1 = "METAL3" layer2 = "METAL2" /* (M3-M2,W=0.28,S=0.28,Cbottom = 3.08e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.1000e-04 */ minFringeCap = 1.1000e-04 nomFringeCap = 1.1000e-04 maxFringeCap = 1.1000e-04 } FringeCap 14 { number = 14 layer1 = "METAL3" layer2 = "METAL1" /* (M3-M1,W=0.28,S=0.28,Cbottom = 1.48e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 5.2857e-05 */ minFringeCap = 5.2857e-05 nomFringeCap = 5.2857e-05 maxFringeCap = 5.2857e-05 } FringeCap 15 { number = 15 layer1 = "METAL2" layer2 = "METAL1" /* (M2-M1,W=0.28,S=0.38,Cbottom = 3.51e-02 fF/um) * (1/W = 1/0.28) * (0.001 pF/fF) = 1.2536e-04 */ minFringeCap = 1.2536e-04 nomFringeCap = 1.2536e-04 maxFringeCap = 1.2536e-04 } FringeCap 16 { number = 16 layer1 = "METAL6" layer2 = "METAL6" /* (M6-FOX,W=0.44,S=0.46,Cc = 1.16e-01 fF/um) * (0.001 pF/fF) = 1.1600e-04 */ minFringeCap = 1.1600e-04 nomFringeCap = 1.1600e-04 maxFringeCap = 1.1600e-04 } FringeCap 17 { number = 17 layer1 = "METAL5" layer2 = "METAL5" /* (M5-FOX,W=0.28,S=0.28,Cc = 9.34e-02 fF/um) * (0.001 pF/fF) = 9.3400e-05 */ minFringeCap = 9.3400e-05 nomFringeCap = 9.3400e-05 maxFringeCap = 9.3400e-05 } FringeCap 18 { number = 18 layer1 = "METAL4" layer2 = "METAL4" /* (M4-FOX,W=0.28,S=0.28,Cc = 9.33e-02 fF/um) * (0.001 pF/fF) = 9.3300e-05 */ minFringeCap = 9.3300e-05 nomFringeCap = 9.3300e-05 maxFringeCap = 9.3300e-05 } FringeCap 19 { number = 19 layer1 = "METAL3" layer2 = "METAL3" /* (M3-FOX,W=0.28,S=0.28,Cc = 9.31e-02 fF/um) * (0.001 pF/fF) = 9.3100e-05 */ minFringeCap = 9.3100e-05 nomFringeCap = 9.3100e-05 maxFringeCap = 9.3100e-05 } FringeCap 20 { number = 20 layer1 = "METAL2" layer2 = "METAL2" /* (M2-FOX,W=0.28,S=0.28,Cc = 9.26e-02 fF/um) * (0.001 pF/fF) = 9.2600e-05 */ minFringeCap = 9.2600e-05 nomFringeCap = 9.2600e-05 maxFringeCap = 9.2600e-05 } FringeCap 21 { number = 21 layer1 = "METAL1" layer2 = "METAL1" /* (M1-FOX,W=0.23,S=0.23,Cc = 1.04e-01 fF/um) * (0.001 pF/fF) = 1.0400e-04 */ minFringeCap = 1.0400e-04 nomFringeCap = 1.0400e-04 maxFringeCap = 1.0400e-04 } DesignRule { layer1 = "VIA23" layer2 = "VIA12" minSpacing = 0 stackable = 1 } DesignRule { layer1 = "VIA34" layer2 = "VIA23" minSpacing = 0 stackable = 1 } DesignRule { layer1 = "VIA45" layer2 = "VIA34" minSpacing = 0 stackable = 1 } DesignRule { layer1 = "VIA56" layer2 = "VIA45" minSpacing = 0 stackable = 1 } DesignRule { layer1 = "via1Blockage" layer2 = "VIA12" minSpacing = 0.26 } DesignRule { layer1 = "via2Blockage" layer2 = "VIA23" minSpacing = 0.26 } DesignRule { layer1 = "via3Blockage" layer2 = "VIA34" minSpacing = 0.26 } DesignRule { layer1 = "via4Blockage" layer2 = "VIA45" minSpacing = 0.26 } DesignRule { layer1 = "via5Blockage" layer2 = "VIA56" minSpacing = 0.35 } PRRule { rowSpacingTopTop = 0 rowSpacingTopBot = 1.03 rowSpacingBotBot = 0 abuttableTopTop = 1 abuttableTopBot = 0 abuttableBotBot = 1 }